CRYSTALLIZATION KINETICS IN FERROELECTRIC THIN-FILMS - VIABILITY OF ATOMIC-FORCE MICROSCOPY

The pyrochlore to perovskite phase transformation was studied in lead zirconate titanate (PZT) thin films. The films were fabricated on plat inum electrodes and annealed by rapid thermal processing (RTP). The ph ases which formed and their location in the him were analyzed using gl ancing angle XRD and depth profiling was demonstrated. Grain size and structure, nucleation sites and surface morphology were determined wit h transmission electron microscopy (TEM) and atomic force microscopy ( AFM). The role of AFM in this type of transformation study was assesse d. The PZT films crystallized with a (100) orientation which was prefe rentially nucleated at the platinum/film interface. RTP at 650 degrees C for 15 s was sufficient to complete the transformation. However, co lumnar grain growth and improvements in the ferroelectric properties w ere obtained with increased RTP time. A PZT film with RTP at 650 degre es C for 1 min possessed a remanent polarization of 25 mu C/cm(2) and a dielectric constant of epsilon = 650. Copyright (C) 1996 Elsevier Sc ience Ltd.