R. Vanwijk et al., THE OXIDATION OF CU PARTICLES SUPPORTED ON OXIDIZED SI(100) AS STUDIED BY NUCLEAR-REACTION ANALYSIS AND ELLIPSOMETRY, Applied surface science, 99(2), 1996, pp. 127-132
Citations number
20
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
The oxidation of Cu particles supported on oxidised Si(100) by molecul
ar oxygen was investigated by means of ellipsometry and Nuclear Reacti
on Analysis. Stepwise oxidation of a sample containing 15 nm Cu partic
les at 473 K and 0.1 Pa showed that the sample was eventually oxidised
to CuO0.74+/-0.08, which is very close to CuO0.67, known from the lit
erature. The ellipsometric parameter delta Delta followed a highly non
-linear curve upon oxygen exposure, exhibiting a maximum during oxidat
ion, but stabilising when the CuO0.74+/-0.08 oxide composition was rea
ched. The oxide stoichiometry was less than Cu2O at the maximum of the
delta Delta-curve, indicating that the CuO0.67-phase nucleated in the
sample before the formation of Cu2O had been completed, During surfac
e oxidation, the sensitivity of delta Delta to the amount of oxygen wa
s similar to that of copper single crystals. The sensitivity of delta
Delta to oxygen increased significantly while samples were oxidised to
Cu2O and further: it was almost three times larger than the sensitivi
ty of delta Delta to oxygen for surface oxidation.