D. Lapadatu et al., A DOUBLE-SIDED CAPACITIVE MINIATURIZED ACCELEROMETER BASED ON PHOTOVOLTAIC ETCH-STOP TECHNIQUE, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 261-266
A double-sided capacitive miniaturized accelerometer is presented. The
photovoltaic etch-stop technique (PHET) is used to simplify the devic
e fabrication. PHET being a relatively new technique, the paper emphas
izes the design rules required in order to have an etch stop. The devi
ce is a uniaxial accelerometer with practically no cross-sensitivity,
which can sense accelerations in the range -5g to 5g. The parasitic ca
pacitances and the effects of the electric forces driving the device a
re cancelled out by its symmetry. The final device measures 2.2 mm X 2
.0 mm X 1.5 mm.