A DOUBLE-SIDED CAPACITIVE MINIATURIZED ACCELEROMETER BASED ON PHOTOVOLTAIC ETCH-STOP TECHNIQUE

A double-sided capacitive miniaturized accelerometer is presented. The photovoltaic etch-stop technique (PHET) is used to simplify the devic e fabrication. PHET being a relatively new technique, the paper emphas izes the design rules required in order to have an etch stop. The devi ce is a uniaxial accelerometer with practically no cross-sensitivity, which can sense accelerations in the range -5g to 5g. The parasitic ca pacitances and the effects of the electric forces driving the device a re cancelled out by its symmetry. The final device measures 2.2 mm X 2 .0 mm X 1.5 mm.