J. Ulrich et R. Zengerle, STATIC AND DYNAMIC FLOW SIMULATION OF A KOH-ETCHED MICROVALVE USING THE FINITE-ELEMENT METHOD, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 379-385
In this paper, we present the simulation of the dow rate through a KOH
-etched microvalve, which is part of an electrostatically actuated mic
ropump. It is realized by a coupled simulation of liquid flow and stru
ctural displacement of the valve using the finite-element method (FEM)
. For this purpose, a new simulation method is developed to calculate
the solid motion inside a liquid by a fluid-structural coupling. Thus
the static and dynamic behaviour of the valve can be simulated in good
agreement with measurements. In addition, an analytical model of the
valve is developed, which allows the explanation of static as well as
complex dynamic effects. In combination with analytical approaches, th
e simulations of the valve can be integrated into system simulations o
f a micropump. The results are of basic importance for the understandi
ng and optimization of bidirectional silicon micropumps.