TOTAL-REFLECTION PIXE (TPIXE) AND RBS FOR SURFACE AND TRACE-ELEMENT ANALYSIS

Authors
VANKAN JA VIS RD
Citation
Ja. Vankan et Rd. Vis, TOTAL-REFLECTION PIXE (TPIXE) AND RBS FOR SURFACE AND TRACE-ELEMENT ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 109, 1996, pp. 85-93
Citations number
13
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
109
Year of publication
1996
Pages
85 - 93
Database
ISI
SICI code
0168-583X(1996)109:<85:TP(ARF>2.0.ZU;2-P
Abstract
MeV proton and alpha beams at small incident angles (0-35 mrad) were u sed to analyse flat surfaces such as Si wafers and coated quartz subst rates. X-rays and backscattered particles were detected in a total ref lection geometry. Using TPIXE a quick and simultaneous detection of di fferent trace elements was established. At very small incident angles of a few mrad, it was observed that the RES yield drops faster than th e X-ray yield, which indicates surface channelling.