Jw. Kim et al., DEVICE CHARACTERISTICS OF POLYCRYSTALLINE SI0.84GE0.16 THIN-FILM TRANSISTORS GROWN FROM SI2H6 AND GEH4 SOURCE GASES, JPN J A P 2, 35(6B), 1996, pp. 757-759
Polycrystalline Si0.84Ge0.16 alloy film was made by solid phase crysta
llization (SPC) of an amorphous film deposited using Si2H6 and GeH4 so
urce gases by low pressure chemical vapor deposition (LPCVD). The grai
n size of the film was about 540 nm and the preferred orientation was
(111). Both n-channel and p-channel polycrystalline Si0.84Ge0.16 thin
film transistors were successfully fabricated using a high temperature
process. The field-effect mobilities of n- and p-channel devices were
13 and 29 cm(2)/V . s, which were improved to 33 and 38 cm(2)/V . s;
respectively, after electron-cyclotron resonance (ECR) hydrogen plasma
treatment.