We have used scanning tunneling microscopy to study Si(111)root 3 x ro
ot 3-In surfaces exposed to atomic hydrogen at temperatures in the ran
ge 350-450 degrees C. For hydrogen doses as low as 2 L a considerable
disorder is induced in the root 3 x root 3 structure. Increasing the d
ose to 10 L results in the formation of two-dimensional islands exhibi
ting 2 x 2, 4 x 1 and root 7 x root 3 reconstructions, exposing small
areas of the underlying surface with the hydrogen-terminated 1 x 1 str
ucture. Our data for the 4 x 1 reconstruction corroborate proposed mod
els consisting of 1 ML of In atoms in two distinct layers. After 50 L
exposure, most of the surface exhibits the hydrogen-terminated 1 x 1 s
tructure with a small amount of isolated defects while about 15% of th
e surface is covered with two-dimensional islands. For the majority of
these islands, showing a weak corrugation with root 7 x root 3 period
icity, we propose a structure consisting of two pseudomorphic In layer
s on top of the Si(111) surface. Further increase of the hydrogen dose
results in the formation of three-dimensional In islands. We observe
a substantial loss of In from the surface during hydrogen exposure, wh
ich increases-with increasing dose and increasing temperature. For sur
faces exposed to 5000 L above 400 degrees C, al In is removed but some
stacking-faulted regions have formed on the resulting hydrogen-termin
ated 1 x 1 surfaces.