Angle- and energy-resolved F+ and Cl+ electron-stimulated desorption d
istributions are collected from Si(100)-2x1 surfaces exposed at room t
emperature to XeF2 or Cl-2. These distributions are fit to a model tha
t accounts for ion-surface interactions in order to extract bond angle
information. It is found that both F and Cl chemisorb on the dangling
bonds of intact Si dimers, at an angle of similar to 20 degrees from
normal along the [011] azimuth. By annealing a chlorinated surface abo
ve similar to 400 K, some normally oriented Si-Cl bonds are generated.
In addition to determining bonding geometries, quantitative informati
on is obtained regarding the image-charge interaction and neutralizati
on for F+ and Cl+ interacting with Si.