Carbon films have been prepared at different substrate temperatures (2
5-800 degrees C) by evaporating carbon from a graphite source with an
electron beam evaporation device. The films have been analyzed by in s
itu electron spectroscopy (UPS, XPS and EELS), ex situ scanning tunnel
ing microscopy (STM) and Raman spectroscopy. The UPS valence band and
EELS spectra reveal a gradual transition from a disordered carbon film
at room temperature deposition to a polycrystalline graphite-like fil
m at 800 degrees C substrate temperature deposition, in good agreement
with the results obtained from Raman spectroscopy. STM images of film
s deposited at 25 degrees C also exhibit a rather disordered carbon ne
twork, whereas with increasing substrate temperature, graphite nanocry
stallites with sizes of about 20 nm are formed. A correlation between
these different characterization techniques is performed.