ELECTRICAL AND OPTICAL-PROPERTIES OF COPPER-OXIDE FILMS PREPARED BY REACTIVE RF MAGNETRON SPUTTERING

Copper oxide thin films were prepared by reactive rf magnetron sputter ing of a pure copper target in an oxygen-argon atmosphere. The phases of the deposited films strongly depend on the oxygen content in the sp uttering gas. X-ray diffraction studies show that by controlling the o xygen partial pressure single phase Cu2O and CuO can be obtained. The resistivity of the Cu2O film in the present study is 43 Omega cm. The optical constants were evaluated from transmission and reflection meas urements.