Layers of InxGa1-xAs with compositions up to x = 0.4 have been grown o
n GaAs(001) substrates by molecular beam epitaxy (MBE). The growth pro
cess was monitored by RHEED intensity oscillations. The experimental p
arameters were optimized for growing surfaces with well-defined compos
itions in a reproducible manner. The intensity variation of the RHEED
oscillations can be described reasonably well using a simple model.