Time evolution of atomic structures during Ag deposition and in subseq
uent annealing on both substrates, root 3 x root 3 Ag/Si(111) and 7 x
7 Si(111), have been studied with use of the lattice gas model. The in
terrelation between the calculated atomic structures and the observed
surface conductance is investigated. On root 3 x root 3 Ag/Si(111), Ag
grows in an island mode and Ag adatoms coexist with 3-dimensional Ag
islands. It was found that the time dependence of adatom density shows
peculiar behavior and is strongly correlated to the observed variatio
n of tile surface conductance. On 7 x 7 Si(111) substrate, Ag grows in
a layer mode, The observed variation of surface conductance indicates
that the conductance from 3 lower overlayers is suppressed.