NiO(100) films have been prepared by deposition of Ni onto Ag(100) in
an O-2 atmosphere. As deduced from low-energy electron diffraction and
photoelectron spectroscopy the films are ordered and grow in a layer-
by-layer mode. Auger electron diffraction of such films has been measu
red for the O (512 eV) and Ni (848 eV) Auger transitions in the entire
halfspace above the sample surface by using a toroidal electrostatic
energy analyzer. The results are compared with computations which have
been obtained by multiple scattering cluster calculations including s
pherical wave corrections. The agreement between experimental and theo
retical data is promising for the O transitions. For the Ni transition
s we have found an unexpected intensity behavior which is tentatively
ascribed to dominant contributions of inelastically scattered electron
s.