Novel structure models for the so-called C-type defect on Si(001) surf
aces are proposed, The key idea in the models is a missing Si atom in
the, second surface layer, The proposed models are locally very stable
and give STM images consistent with the observed one, The second subj
ect is the analysis on the initial processes of the homoepitaxial crys
tal growth on Si(001) surfaces. The stability of several ad-Si atom cl
usters and the activation energies for some elementary processes are d
iscussed.