SILICON MICROMACHINING - SENSORS TO SYSTEMS

Authors
KOVACS GTA PETERSEN K ALBIN M
Citation
Gta. Kovacs et al., SILICON MICROMACHINING - SENSORS TO SYSTEMS, Analytical chemistry, 68(13), 1996, pp. 407-412
Citations number
31
Categorie Soggetti
Chemistry Analytical
Journal title
Analytical chemistry → ACNP
ISSN journal
00032700
Volume
68
Issue
13
Year of publication
1996
Pages
407 - 412
Database
ISI
SICI code
0003-2700(1996)68:13<407:SM-STS>2.0.ZU;2-R