Strong visible photoluminescence (PL) has been observed at room temper
ature from oxidized amorphous hydrogenated germanium. Excitation by th
e 488 nm line from an argon ion laser yields a brood PL peak at 2.2 eV
with a full-width-half-maximum (FWHM) of 0.5 eV. The luminescence int
ensity depends on the morphology of the untreated a-Ge:H film produced
by plasma enhanced chemical vapor deposition (PECVD). Films ranging f
rom ones with coarse columnar microstructure and poor photoelectronic
properties to ones with microstructure similar to that of device-quali
ty a-Si:H were intentionally chosen. After oxidation in air at 500 deg
rees C for one hour, the films with coarse microstructure yield the hi
ghest luminescence intensity, comparable to that from porous silicon,
while the best films with minimum microstructure yield orders of magni
tude lower intensity, Removing the germanium oxide from the film reduc
es the luminescence intensity. Powder-like Ge was also produced by the
rmal evaporation in 0.3 Torr of argon. After annealing in air at 500 d
egrees C for two hours strong PL is observed with peak position and sp
ectral width similar to those from oxidized poor PECVD a-Ge:H and comm
ercial GeO2.