DISTRIBUTION OF DANGLING BONDS IN LIGHT-SOAKED AND IN HIGH-TEMPERATURE-ANNEALED A-SI-H

The spatial distributions of dangling bonds in light-soaked and in hig h-temperature-annealed a-Si:H have been studied. The distribution of d angling bonds in light-soaked a-Si:H is non-uniform and the density of dangling bonds has an inverse power-law depth dependence N-v(x) = C(v )x(-delta), with delta being about 0.6. The distribution of dangling b onds in high-temperature-annealed a-Si:H depends on the annealing time . For short annealing times, the distribution is highly non-uniform. A t sufficiently long annealing times, saturation of the dangling bond d ensity occurs and the distribution of dangling bonds becomes uniform.