REACTIVE ACCELERATED CLUSTER EROSION (RACE) BY IONIZED CLUSTER BEAMS

Authors
GSPANN J
Citation
J. Gspann, REACTIVE ACCELERATED CLUSTER EROSION (RACE) BY IONIZED CLUSTER BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 86-88
Citations number
5
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
112
Issue
1-4
Year of publication
1996
Pages
86 - 88
Database
ISI
SICI code
0168-583X(1996)112:1-4<86:RACE(B>2.0.ZU;2-7
Abstract
Beams of ionized clusters accelerated up to about 120 keV kinetic ener gy per cluster are used for cluster impact lithography. Chemical react ions of clusters of CO2, or of SF6, respectively, are found to assist the physical erosion by hypervelocity cluster impacts in yielding vola tile products. Natural diamond, silicon and Pyrex glass have been micr ostructured showing very smooth eroded surfaces.