DESIGN CONSIDERATIONS FOR PLASMA IMMERSION ION-IMPLANTATION SYSTEMS

Authors
MANDL S BRUTSCHER J GUNZEL R MOLLER W
Citation
S. Mandl et al., DESIGN CONSIDERATIONS FOR PLASMA IMMERSION ION-IMPLANTATION SYSTEMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 252-254
Citations number
18
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
112
Issue
1-4
Year of publication
1996
Pages
252 - 254
Database
ISI
SICI code
0168-583X(1996)112:1-4<252:DCFPII>2.0.ZU;2-X
Abstract
Design specifications for plasma immersion ion implantation (PIII) sys tems are discussed. Inherent restrictions for the plasma generation, t he dimension of the vacuum chamber, and the pressure range are deduced from an analytical model of the plasma sheath evolution. The total fl uence per pulse and the implantation duration are calculated.