BEAM SCANNING SYSTEM FOR THE UNIFORMITY OF IMPLANTED DOSES IN A LARGE-AREA

Authors
DESGARDIN P NTSOENZOK E BARBOT JF BRIAUD J VERNOIS J ISABELLE DB
Citation
P. Desgardin et al., BEAM SCANNING SYSTEM FOR THE UNIFORMITY OF IMPLANTED DOSES IN A LARGE-AREA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 267-269
Citations number
9
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
112
Issue
1-4
Year of publication
1996
Pages
267 - 269
Database
ISI
SICI code
0168-583X(1996)112:1-4<267:BSSFTU>2.0.ZU;2-N
Abstract
In order to improve the uniformity of the deposit dose (MeV) ion-irrad iated samples, a specific ion beam system has been developed. This sys tem allows us to irradiate samples with different types of scanning (L issajous, raster scan, circular raster scan) at different sweeping fre quencies. This set-up permits to obtain irradiations with a dose varia tion less than 1.5% over the sample with a diameter up to 10 cm. The s ystem is presently devoted to lifetime control in semiconductors.