SELF-CONSISTENT ANALYSIS OF LOW-TEMPERATURE OXYGEN PLASMA AND PROCESSES OF ITS INTERACTION WITH SOME POLYMER MATERIALS

Authors
RYBKIN VV BESSARAB AB KUVALDINA EV MAXIMOV AI TITOV VA
Citation
Vv. Rybkin et al., SELF-CONSISTENT ANALYSIS OF LOW-TEMPERATURE OXYGEN PLASMA AND PROCESSES OF ITS INTERACTION WITH SOME POLYMER MATERIALS, Pure and applied chemistry, 68(5), 1996, pp. 1041-1045
Citations number
37
Categorie Soggetti
Chemistry
Journal title
Pure and applied chemistry → ACNP
ISSN journal
00334545
Volume
68
Issue
5
Year of publication
1996
Pages
1041 - 1045
Database
ISI
SICI code
0033-4545(1996)68:5<1041:SAOLOP>2.0.ZU;2-X
Abstract
Self-consistent model of glow discharge plasma in oxygen is discussed. The model is based on simultaneous solution of the Boltzmann equation , equations of charged and neutral particles balance, vibrational kine tics equations for O-2(X(3) Sigma, V) molecules and heat-transfer equa tion. Model discussed allows to calculate intrinsic plasma properties on the base of its external parameters with acceptable accuracy. Resul ts of experimental investigation of polymers plasmolysis are presented . Some aspects of oxygen plasma interaction with polymers are discusse d on the base of experimental data and modelling results.