Propel-ties of binary gratings for beam diagnostics of high-power CO2
lasers are investigated. The layout uses a modal theory that includes
absorption oi metallic surfaces by impedance boundary condition. Radia
tion-resistant gratings were fabricated in copper with photolithograph
y combined with galvanic technology. In this Pray gratings have been r
ealized in which the first-order diffraction efficiencies are polariza
tion independent. Use of a second grating to reduce elliptical beam di
stortion is demonstrated. Finally it is shown that Rayleigh anomalies
for binary diagnostic gratings are accompanied by high absorption. (C)
1996 Optical Society of America