T. Wieder, WVM - A COMPUTER-PROGRAM FOR THE DETERMINATION OF LATTICE-PARAMETERS AND STRAINS IN THIN-FILMS, Computer physics communications, 96(1), 1996, pp. 53-60
X-ray diffraction provides a method for the determination of the strai
n and stress tensor in a polycrystalline sample. The knowledge of the
unstrained lattice parameters is a prerequisite to calculate strains f
rom measured reflection shifts. For thin films a model exists to find
the unstrained lattice parameters and the strain or stress tensor toge
ther from the measured reflection positions.