Cadmium telluride films were deposited from a CdTe target using rf pla
nar magnetron system on CdS/ITO/Glass substrates. The as grown films w
ere polycrystalline and consisted of closepacked array of preferential
ly oriented single crystal grains. Chemical heat treatment using cadmi
um chloride was used to form the junction between cadmium sulphide and
cadmium telluride layers. It also improves the structure of the sputt
ered CdTe film and the lifetime of carriers.