Structural properties of short period GaInAs/InP superlattices prepare
d by organometallic vapor phase epitaxy are investigated with Raman sc
attering. The observation of as many as five orders of folded longitud
inal acoustic doublers attests to the structural quality of the superl
attices. Well and barrier relative layer thicknesses and superlattice
period are estimated from analysis of doubler intensity and position,
respectively. Examination of the optic modes reveals that the well is
comprised of two separate layers: a GaInAsP layer under tension near t
he barrier/well interface and a GaInAs layer under compression near th
e well/barrier interface. Finally, the Raman results are confirmed by
simulation of double crystal x-ray diffraction spectra from the short
period structures. (C) 1996 American institute of Physics.