STRUCTURE OF LASER-DEPOSITED METALLIC ALLOYS AND MULTILAYERS

The structure of metallic alloys and multilayers prepared by pulsed la ser deposition using KrF radiation (248 nm) and a pulse duration of 30 ns was investigated by X-ray diffraction. In comparison with conventi onal deposition techniques, the structural properties of laser-deposit ed Fe-Nb and Fe-Ag films can be characterized by the formation of amor phous or metastable nanocrystalline phases with higher solubilities, u nusually enlarged lattice spacings in the growth direction and differe nt film textures. Often these films are in a state further away from t he equilibrium state than sputtered or evaporated samples, Fe/Nb multi layers exhibit much broader amorphous interfaces, while Fe/Ag superlat tices shaw a different texture and sharp interfaces visible by satelli te reflections in the X-ray spectra. These differences can be understo od by the about 10(5) times higher instantaneous deposition rate and t he high kinetic energy of the deposited particles in the range of up t o 100 eV.