MONTE-CARLO SIMULATION OF NON-SPECULAR X-RAY-SCATTERING PROFILES FROMMULTILAYERED STRUCTURES

Authors
GLADYSZEWSKI G BRUYNSERAEDE Y
Citation
G. Gladyszewski et Y. Bruynseraede, MONTE-CARLO SIMULATION OF NON-SPECULAR X-RAY-SCATTERING PROFILES FROMMULTILAYERED STRUCTURES, Thin solid films, 275(1-2), 1996, pp. 184-187
Citations number
7
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
275
Issue
1-2
Year of publication
1996
Pages
184 - 187
Database
ISI
SICI code
0040-6090(1996)275:1-2<184:MSONXP>2.0.ZU;2-1
Abstract
A simple model for calculating non-specular X-ray scattering profiles from non-ideal multilayers is proposed. A Monte Carlo method is used t o simulate a ''imperfect'' multilayer structure. Non-specular profiles are calculated using the kinematical theory of scattering. The influe nce of uncorrelated, laterally correlated, and vertically correlated i nterface roughness on omega-scans is studied.