STUDY OF STRUCTURAL IMPERFECTIONS IN SPUTTERED CO CU MULTILAYERS/

Structural deviations from ideal layering can have a marked effect on the physical properties of multilayers. Using X-ray diffraction and cr oss-sectional transmission electron microscopy as the structural probe s, we have systematically identified the presence of a variety of stru ctural imperfections in sputtered Co/Cu multilayers. By constructing a structural model which realistically represents the multilayer struct ures, we attempt to extract structural data on the regularity of layer ing and interfacial roughness through the fitting of low-angle X-ray d iffractograms.