HIGH-THROUGHPUT WAFER STEPPER WITH ADJUSTABLE ILLUMINATION MODES

Authors
MULKENS J STOELDRAIJER J ROGOFF R DEKLERK J JENKINS P WANGLER J KALMBACH G RUPP W PIPER E
Citation
J. Mulkens et al., HIGH-THROUGHPUT WAFER STEPPER WITH ADJUSTABLE ILLUMINATION MODES, Solid state technology, 39(7), 1996, pp. 193
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
39
Issue
7
Year of publication
1996
Database
ISI
SICI code
0038-111X(1996)39:7<193:HWSWAI>2.0.ZU;2-U
Abstract
An illumination system has been designed to extend the resolution limi ts and depth of focus (DOF) parameters for the next generation of i-li ne and deep-ultraviolet (DUV) wafer steppers, This high-efficiency pro jection scheme allows a wide range of coherence, annularity, and conti nuously variable numerical aperture (NA) illumination. Implementation of these concepts in an i-line stepper and initial performance results are described, The imaging performance was analyzed with simulation s tudies and verified by measurement results.