SIMULTANEOUS MEASUREMENTS OF LIQUID PROPERTIES USING MULTICHANNEL SHEAR HORIZONTAL SURFACE-ACOUSTIC-WAVE MICROSENSOR

Surface acoustic waves (SAW) with a shear horizontal polarized displac ement (SH-SAW) can be used to determine mechanical and electrical prop erties of an adjacent liquid. We propose a new multichannel SH-SAW mic rosensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36 degrees rotated Y-cut X-propagating LiTaO3, consists of three SAW delay lines. The propagating surfaces of two of the dela y lines are metallized and electrically shorted, and the other one has a free surface which is an electrically active area. The viscosity, c onductivity and permittivity of liquid are obtained simultaneously usi ng the multichannel SH-SAW microsensor.