LIGHT GENERATION AND TRANSPORTATION IN LUMINESCENT A-SIC-H THIN-FILM WAVE-GUIDES

Carbon-rich films were deposited from liquid oganosilane sources tetra methylsilane (TMS), hexamethyldisilane (HMDS) and hexamethyldisilazane (HMDSN). These films generally show efficient photoluminescence (PL) at room temperature (RT), when excited with ultraviolet (UV) light. Fo r certain preparation conditions the self-absorption in the low energy wing of the PL can be reduced below 1 cm(-1). This property together with a sufficiently high index of refraction allows for a waveguide op eration mode, where the guided light is generated in the waveguide its elf via PL. particularly, a thermal post-treatment of the deposited fi lms has a major influence on the self-absorption and on the PL.