Intrinsic microcrystalline silicon (mu c-Si:H) films deposited in a ra
dio frequency (rf) glow discharge of monosilane highly diluted with hy
drogen were applied to p-i-n solar cells. The open circuit voltage (V-
oc) decreased and the short circuit current (I-sc) increased with the
increase of crystalline fraction in the film. The experimental results
suggested that the crystalline boundary affected fill factor (FF) and
light degradation. It turned out that cells with high stability could
be obtained in the crystalline fraction region as low as about 33%. A
tandem cell with the intrinsic bottom layer of 33% crystalline fracti
on had the initial and the stabilized efficiency of 9.4% and 8.5%, res
pectively.