Measurements are presented of the reverse bias currents in hydrogenate
d amorphous silicon nip diode sensors with sizes characteristic of tho
se used in two dimensional sensor arrays. Several plates of sensors fr
om different depositions were examined. The sensor currents have a com
mon low-voltage characteristic due to 'central' leakage currents which
scale with the sensor's area. At larger voltages sensors from differe
nt depositions exhibit a highly variable excess current which scales w
ith peripheral length. We describe transient charge measurements for d
istinguishing currents originating from electron/hole generation curre
nts and from injection at the n/i and i/p interfaces. It is concluded
that the central currents are dominated by generation, and the periphe
ral currents by injection.