A LINEAR-ARRAY THIN-FILM POSITION-SENSITIVE DETECTOR FOR 3D MEASUREMENTS

A novel compact linear thin film position sensitive detector with 128 elements, based on p-i-n a-Si:H devices was developed. The proper inco rporation of this sensor into an optical inspection camera makes possi ble the acquisition of three dimension information of an object, using laser triangulation methods. The main advantages of this system, when compared with the conventional charge-coupled devices, are the low co mplexity of hardware and software used and that the information can be continuously processed (analogue detection).