Nv. Gavrilov et al., SOURCE OF INTENSE WIDE BEAMS OF GAS IONS BASED ON THE DISCHARGE WITH A HOLLOW-CATHODE IN A MAGNETIC-FIELD, Instruments and experimental techniques, 39(1), 1996, pp. 81-85
An ion source is described that is based on a low-pressure glow discha
rge (less than or equal to 0.1 Pa) with oscillating electrons in a wea
k magnetic field (0.2-5 mT). It is shown that ion beams can be produce
d that have a cross-section area up to 1000 cm(2), a current density o
f 0.1-10 mA/cm(2), and a distribution inhomogeneity over the beam cros
s section of less than or equal to 10%. Mass-charge composition of the
ion beam was measured with O-2, N-2, and Ar. It was shown that the im
purity content could be reduced down to a few fractions of a percent.
Having a cold cathode with an increased service life (similar to 1000
hours), the source for the ion-implantation treatment produces a wide
(similar to 150 cm(2)) ion beam of energy up to 40 keV and an average
current up to 50 mA in the pulsed-periodic regime (f = 1-50 s(-1), t =
1 ms).