MICROWAVE SOURCE FOR AN OXYGEN PLASMA

Authors
ZALESKII YG EREMKA VD KUSHNIR VA NAZAROV NI POTAPENKO VA STRELNITSKII VE SHULAEV BM
Citation
Yg. Zaleskii et al., MICROWAVE SOURCE FOR AN OXYGEN PLASMA, Instruments and experimental techniques, 39(1), 1996, pp. 86-89
Citations number
10
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
39
Issue
1
Year of publication
1996
Pages
86 - 89
Database
ISI
SICI code
0020-4412(1996)39:1<86:MSFAOP>2.0.ZU;2-9
Abstract
A laboratory specimen of a microwave source for an oxygen plasma whose operation is based on electron cyclotron resonance is described. The parameters of a plasma obtained in a reactor with a diameter of 250 mm and an input microwave power of 5 kW with a frequency of 2.45 GHz rea ched the following values: 7.8 x 10(11) cm(-3) (plasma density), 8 eV (electron temperature), +50 V (plasma potential), and up to 60 mA/cm(2 ) (ion current density). The optimum pressure is 10(-1) torr. The size of the region of the homogeneous plasma at the reactor output allows for the treatment of samples with a diameter of up to 180 mm.