BINARY THIN-FILMS DEPOSITED BY ION-BEAMS - SIMPLE ESTIMATE OF THE NEAR-SURFACE AND BULK COMPOSITION

Authors
GRIGOROV GI GRIGOROV KG VIGNES JL LANGERON JP SPORKEN R
Citation
Gi. Grigorov et al., BINARY THIN-FILMS DEPOSITED BY ION-BEAMS - SIMPLE ESTIMATE OF THE NEAR-SURFACE AND BULK COMPOSITION, Le Vide, 52(280), 1996, pp. 244
Citations number
6
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Le Vide → ACNP
ISSN journal
12660167
Volume
52
Issue
280
Year of publication
1996
Database
ISI
SICI code
1266-0167(1996)52:280<244:BTDBI->2.0.ZU;2-T
Abstract
Sample estimate of the near-surface and film-bulk composition in binar y films deposited by ions of the constituent species is given. An exam ple illustrates the near-surface composition profiles in Si-C films, w hen deposited by Si and C ions and by C ions only, the Si atoms being deposited as low-energy particles.