INTERACTION OF UHF-PLASMA WITH ELECTRON-C YCLOTRON-RESONANCE ON ELECTROPHYSICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS

Authors
BYLINKINA NN MUSHTAKOVA SP OLEINIK VA SKRIPAL AV USANOV DA USHAKOV NM YAFAROV RK
Citation
Nn. Bylinkina et al., INTERACTION OF UHF-PLASMA WITH ELECTRON-C YCLOTRON-RESONANCE ON ELECTROPHYSICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS, Pis'ma v Zurnal tehniceskoj fiziki, 22(6), 1996, pp. 43-47
Citations number
2
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
22
Issue
6
Year of publication
1996
Pages
43 - 47
Database
ISI
SICI code
0320-0116(1996)22:6<43:IOUWEY>2.0.ZU;2-L