SPUTTERING OF STAINLESS-STEELS OF DIFFERE NT CLASSES BY THE OXYGEN PLASMA FLUX IN THE THRESHOLD ENERGY-RANGE

Authors
AKISHIN AI CHERNIK VN KULIKAUSKAS VS ZATEKIN VV
Citation
Ai. Akishin et al., SPUTTERING OF STAINLESS-STEELS OF DIFFERE NT CLASSES BY THE OXYGEN PLASMA FLUX IN THE THRESHOLD ENERGY-RANGE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(4), 1996, pp. 143-144
Citations number
4
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
60
Issue
4
Year of publication
1996
Pages
143 - 144
Database
ISI
SICI code
0367-6765(1996)60:4<143:SOSODN>2.0.ZU;2-D