PLANAR ELECTRIC MICROMOTORS

Authors
DYATLOV VL KONYASHKIN VV POTAPOV BS PYANKOV YA
Citation
Vl. Dyatlov et al., PLANAR ELECTRIC MICROMOTORS, ELECTRICAL TECHNOLOGY, (1), 1996, pp. 1-18
Citations number
40
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
ELECTRICAL TECHNOLOGY → ACNP
ISSN journal
09655433
Issue
1
Year of publication
1996
Pages
1 - 18
Database
ISI
SICI code
0965-5433(1996):1<1:PEM>2.0.ZU;2-G
Abstract
The physical principles of designing planar electric micromotors with a rating below 10 W for microrobots are considered. The application of planar microelectronics technology makes it possible to create multif unctional electromechanical precision devices of high capacity at a co nsiderably reduced cost. Examples of planar electrostatic film micromo tor designs are described. Particular attention is given to questions of optimization of electromechanical energy conversion in electrostati c and piezoelectric film micromotors. (C) 1996 Elsevier Science Ltd. A ll rights reserved.