SETUP FOR TIME-RESOLVED MEASUREMENTS OF THE ENERGY-DISTRIBUTION OF CHARGED-PARTICLES BOMBARDING ELECTRODE IN RF DISCHARGE

Authors
SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS
Citation
As. Smirnov et al., SETUP FOR TIME-RESOLVED MEASUREMENTS OF THE ENERGY-DISTRIBUTION OF CHARGED-PARTICLES BOMBARDING ELECTRODE IN RF DISCHARGE, Instruments and experimental techniques, 39(2), 1996, pp. 242-247
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
39
Issue
2
Year of publication
1996
Pages
242 - 247
Database
ISI
SICI code
0020-4412(1996)39:2<242:SFTMOT>2.0.ZU;2-5
Abstract
A method is proposed and an experimental setup is described for studyi ng the distribution functions of electrons and ions supplied from plas ma to an electrode in various phases of the RF field pulse. The charge d particle beam was controlled by a compensated-gate device opened by a rectangular pulse with a duration of 10 ns synchronized with the RF voltage. The energy spectra of electrons were measured in various phas es of the RF held pulse. The time resolution of the instrument is abou t 11 ns.