As. Smirnov et al., SETUP FOR TIME-RESOLVED MEASUREMENTS OF THE ENERGY-DISTRIBUTION OF CHARGED-PARTICLES BOMBARDING ELECTRODE IN RF DISCHARGE, Instruments and experimental techniques, 39(2), 1996, pp. 242-247
A method is proposed and an experimental setup is described for studyi
ng the distribution functions of electrons and ions supplied from plas
ma to an electrode in various phases of the RF field pulse. The charge
d particle beam was controlled by a compensated-gate device opened by
a rectangular pulse with a duration of 10 ns synchronized with the RF
voltage. The energy spectra of electrons were measured in various phas
es of the RF held pulse. The time resolution of the instrument is abou
t 11 ns.