A SYSTEM FOR CATHODE SPOT INITIATION IN A VACUUM-ARC ION-SOURCE

Citation
Ag. Nikolaev et al., A SYSTEM FOR CATHODE SPOT INITIATION IN A VACUUM-ARC ION-SOURCE, Instruments and experimental techniques, 39(2), 1996, pp. 248-251
Citations number
18
Categorie Soggetti
Instument & Instrumentation",Engineering
ISSN journal
00204412
Volume
39
Issue
2
Year of publication
1996
Pages
248 - 251
Database
ISI
SICI code
0020-4412(1996)39:2<248:ASFCSI>2.0.ZU;2-E
Abstract
A system for vacuum-arc cathode spot initiation in metal vapor vacuum- are ion sources is described. A specific feature of the initiation sys tem is the use of an auxiliary gas discharge in a strong magnetic held . A striking voltage for an operating pressure 3 x 10(-3) Pa was less than or equal to 100 V. The initiation system was used in an ion sourc e whose design and certain characteristics are also reported.