ULTRAFINE MOTION DETECTION OF MICROMECHANICAL STRUCTURES USING OPTICAL MOIRE PATTERNS

Authors
TRAN ATTD LEE JJ ZHANG K LO YH
Citation
Attd. Tran et al., ULTRAFINE MOTION DETECTION OF MICROMECHANICAL STRUCTURES USING OPTICAL MOIRE PATTERNS, IEEE photonics technology letters, 8(8), 1996, pp. 1058-1060
Citations number
12
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
8
Issue
8
Year of publication
1996
Pages
1058 - 1060
Database
ISI
SICI code
1041-1135(1996)8:8<1058:UMDOMS>2.0.ZU;2-Q
Abstract
The use of optical Moire patterns for motion and microtribology detect ion of micromechanical devices has been proposed and demonstrated, Usi ng a very simple image processing technique, 50-nm in-plane motion of a micromechanical sensor has been detected, With an improved device de sign, the spatial resolution for in-plane motion detection will be abl e to reach 10 nm, meeting the most stringent requirement for any known applications for microelectromechanical systems (MEMS).