THE PHOTOLYSIS OF PURE AND MIXED PALLADIUM ACETATE THIN-FILMS - FIRSTRESULTS OF DEVELOPING A PHOTOCHEMICAL FULL-ADDITIVE TECHNOLOGY FOR MICROELECTRONICS

The photochemical features of pure Palladium acetate thin films, thin films of Benzocyclobutene prepolymers, mixtures of both and mixtures o f Palladium acetate with 2.6-Bis-(azidobencylidene-4-methyl-cyclo-hexa none) have been investigated by UV-Vis- and XPS-spectrometry. The Pd2-ions of these films show no change of their oxidation level by exposi tion to light of 222 or 254 nm. In contrast to laser exposition, the o rganic part of the Palladium acetate molecule is not destroyed, but cr oss-linked. The components of mixed layers with Palladium acetate ment ioned above show an activation effect to light of wavelengths up to 36 5 and 436 nm. A process for manufacturing metallic microstructures by use of standard aligner technology used in microelectronics is describ ed.