THE PHOTOLYSIS OF PURE AND MIXED PALLADIUM ACETATE THIN-FILMS - FIRSTRESULTS OF DEVELOPING A PHOTOCHEMICAL FULL-ADDITIVE TECHNOLOGY FOR MICROELECTRONICS
T. Stolle et al., THE PHOTOLYSIS OF PURE AND MIXED PALLADIUM ACETATE THIN-FILMS - FIRSTRESULTS OF DEVELOPING A PHOTOCHEMICAL FULL-ADDITIVE TECHNOLOGY FOR MICROELECTRONICS, Journal of information recording, 23(1-2), 1996, pp. 209-221
The photochemical features of pure Palladium acetate thin films, thin
films of Benzocyclobutene prepolymers, mixtures of both and mixtures o
f Palladium acetate with 2.6-Bis-(azidobencylidene-4-methyl-cyclo-hexa
none) have been investigated by UV-Vis- and XPS-spectrometry. The Pd2-ions of these films show no change of their oxidation level by exposi
tion to light of 222 or 254 nm. In contrast to laser exposition, the o
rganic part of the Palladium acetate molecule is not destroyed, but cr
oss-linked. The components of mixed layers with Palladium acetate ment
ioned above show an activation effect to light of wavelengths up to 36
5 and 436 nm. A process for manufacturing metallic microstructures by
use of standard aligner technology used in microelectronics is describ
ed.