TiN films have been deposited on graphite substrates by a novel reacti
ve plasma technique. In this process, NH3 and TiCl4 are reacted in the
jet of a plasma torch and are deposited onto a substrate forming TIN
films at a high growth rate (above 2 mu m min(-1)). It was found that
the process parameters strongly affect the microstructure, thickness,
density, and growth rate of the TiN films. These parameters include N:
Ti ratio, temperature of substrate, spray distance and radial position
away from the impingement point. In general, it was found that thick
and dense coatings were deposited when the N:Ti ratio was kept low and
the substrate temperature was high. Very dense and thin TiN coatings
were deposited 3-4 cm away from the impingement point. These coatings
are believed to be the result of a gas phase (chemical vapour depositi
on type) reaction. The limitations and advantages of this technique ar
e also discussed in this paper.