PVD PROCESSES - DEPOSITION RATE MONITORS

Authors
Citation
Dm. Mattox, PVD PROCESSES - DEPOSITION RATE MONITORS, Plating and surface finishing, 83(8), 1996, pp. 41-42
Citations number
1
Categorie Soggetti
Metallurgy & Metallurigical Engineering","Materials Science, Coatings & Films
ISSN journal
03603164
Volume
83
Issue
8
Year of publication
1996
Pages
41 - 42
Database
ISI
SICI code
0360-3164(1996)83:8<41:PP-DRM>2.0.ZU;2-L