NB3SN THIN-FILMS MADE BY RF MAGNETRON SPUTTERING PROCESS WITH A REACTED NB3SN POWDER TARGET

We have developed a high field pulsed superconductor with a high elast ic modulus fiber for reinforcement called FRS (Fiber Reinforced Superc onductor). These fiber reinforced superconductors will be formed by ma gnetron sputtering techniques of two opposed planar targets in future. In this process for Nb3Sn compound a single phase material target wou ld be desired to be developed to shorten the deposition process. We ha ve succeeded to make a sputtering target which consists of Nb3Sn singl e phase material by powder metallurgy. Fiber reinforced superconductor of Nb3Sn on Ta fiber has been successfully fabricated with this targe t. The Nb3Sn film as grown on a heated substrate has been attempted to form by this single phase target.