ARC EVAPORATED TI-N FILMS WITH REDUCED MACROPARTICLE CONTAMINATION

Through effective magnetic are steering and optimization of the modes of reactive deposition and ion assistance, Ti-N films with reduced dro plet contamination were produced. Are steering was accomplished by two small-sized rotating electromagnets with low power consumption (< 100 W). The maximum size and the number density of the droplets greater t han 1 mu m on the surface of the deposited Ti-N films did not exceed 4 mu m and 4000 mm(-2), respectively. These characteristics make the Ti -N coatings obtained in the present contribution superior to Ti-N film s produced by are deposition methods currently used for industrial app lications, Moreover, the Ti-N films investigated are characterized wit h dense structure, smooth surface, good adhesion, high microhardness a nd corrosion resistance. These Ti-N films could find successful applic ation as wear- and corrosion-resistant coatings on cutting and forming tools.