J. Mencik et al., ELASTIC-MODULUS OF TBDYFE FILMS - A COMPARISON OF NANOINDENTATION ANDBENDING MEASUREMENTS, Thin solid films, 287(1-2), 1996, pp. 208-213
The determination of elastic modulus of thin layers using nanoindentat
ion and bending tests is explained first. Then, the measurements made
on glass and silicon specimens coated with magnetostrictive TbDyFe fil
ms are described. The average modulus obtained by nanoindentation (78
GPa) was significantly higher than that from the bending tests (59 GPa
). This indicates anisotropy in mechanical properties of sputtered TbD
yFe films. Such anisotropy can also be expected in other films, and mu
st be taken into account when determining mechanical properties or mod
eling the behaviour of coated components.