ELASTIC-MODULUS OF TBDYFE FILMS - A COMPARISON OF NANOINDENTATION ANDBENDING MEASUREMENTS

Authors
MENCIK J QUANDT E MUNZ D
Citation
J. Mencik et al., ELASTIC-MODULUS OF TBDYFE FILMS - A COMPARISON OF NANOINDENTATION ANDBENDING MEASUREMENTS, Thin solid films, 287(1-2), 1996, pp. 208-213
Citations number
14
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
287
Issue
1-2
Year of publication
1996
Pages
208 - 213
Database
ISI
SICI code
0040-6090(1996)287:1-2<208:EOTF-A>2.0.ZU;2-M
Abstract
The determination of elastic modulus of thin layers using nanoindentat ion and bending tests is explained first. Then, the measurements made on glass and silicon specimens coated with magnetostrictive TbDyFe fil ms are described. The average modulus obtained by nanoindentation (78 GPa) was significantly higher than that from the bending tests (59 GPa ). This indicates anisotropy in mechanical properties of sputtered TbD yFe films. Such anisotropy can also be expected in other films, and mu st be taken into account when determining mechanical properties or mod eling the behaviour of coated components.