A stiffness matrix formulation is proposed to incorporate electro-mech
anical relations for simulating the V(z) curves of a line-focus acoust
ic microscope for layered media. Examples for the layer/substrate conf
iguration of polycrystalline ZnO and silicon, which are assumed to be
isotropic, are well discussed. Leaky Rayleigh, Sezawa and/or pseudo-Se
zawa waves with respect to various layer thicknesses, can be easily mo
deled and interpreted from their V(z) curves. Results obtained from di
fferent electromechanical relations are also compared.